Charged particle emission device, system, method, and program
US12230478B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 8, 2022 |
| Grant date | Feb 18, 2025 |
| Priority date | — |
| Expiry date | Jun 21, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06375
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle emission device includes a pre-emission state detector configured to detect a pre-emission charged state which is a charged state of the charged object before charged particles are emitted, an emission time generator configured to generate an emission time based on a past emission time of charged particles and a charged state of the charged object after the emission, emission processor circuitry configured to emit charged particles to the charged object which is in the pre-emission charged state based on the generated emission time, a post-emission state detector configured to detect a post-emission charged state which is a charged state of the charged object after the charged particles are emitted, machine learning processor circuitry configured to cause a machine learning model to learn a correspondence among the pre-emission charged state, the post-emission charged state, and the emission time generated by the emission time generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.