Display substrate, manufacturing method thereof and display apparatus
US12230648B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 28, 2021 |
| Grant date | Feb 18, 2025 |
| Priority date | — |
| Expiry date | Jun 1, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/134309
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure provides a display substrate, a manufacturing method thereof and a display apparatus, and relates to the field of display technology. The manufacturing method of a display substrate includes providing a base substrate, and forming pixels on the base substrate, wherein the forming pixels includes: forming a first auxiliary electrode on the base substrate; forming a first interlayer insulating layer on a side of the first auxiliary electrode away from the base substrate; sequentially forming a second conductive film and a first photoresist layer, exposing the first photoresist layer with a mask plate having regions of different light transmittances by controlling exposure time based on requirements on an operating frequency band of the pixels, to form a source electrode and a drain electrode of the thin film transistor and a second auxiliary electrode, forming a second interlayer insulating layer; and forming a pixel electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.