Automated gas supply system
US12233560B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2023 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Dec 20, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B19/41895
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a residual gas detector configured to detect a residual amount of the gas stored in the gas cylinder fastened to the gas pipe, and when the residual amount of the gas detected by the …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.