Calibration method for a micromachined inertial angle sensor and calibration system
US12235129B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2022 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Aug 29, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The method for calibrating a micromachined inertial angle sensor (2) comprising a support, at least one vibrating mass movable relative to the support, at least one transducer for exciting vibrating movement of the vibrating mass, at least one transducer for detecting a vibration of the vibrating mass, and at least one electrostatic transducer being capable of applying an adjustable electrostatic stiffness to the vibrating mass, the calibration method comprising the steps of the angle sensor receiving a predetermined vibrational excitation emitted by an excitation device (18) separate from the excitation transducer; the detection transducer measuring the vibration of the vibrating mass to obtain a measurement signal (Sm) from said measurement by the detection transducer; and transforming; determining, adjusting, and applying the electrostatic stiffness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.