Gas-inlet module and gas-inlet nozzle
US12237193B2 · kind B2 · utility
0Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 28, 2022 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Sep 6, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6773
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A gas-inlet module and a gas-inlet nozzle are provided. The gas-inlet has a first gas-inlet channel and a second gas-inlet channel. The first gas-inlet channel has a first end opening, the second gas-inlet channel has a second end opening, and a distance between a center point of the first end opening and a center point of the second end opening is defined as an offset distance. A value defined by an inner radius of the first end opening or an inner radius of the second end opening divided by the offset distance is within a range from 1/7 to 5/7.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.