Cartridge for inspection
US12237236B2 · kind B2 · utility
0Cited by
1References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 15, 2021 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Dec 3, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/8171
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to the inspection process which includes providing access to the microdevice contacts, measuring the microdevice and analyzing the data to identify defects or performance of the micro device. The invention also relates to the forming of test electrodes on microdevices. The test electrodes may be connected to hidden contacts. The type of microdevices may be vertical, lateral or a flip chip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.