MEMS assembly and process flow
US12237780B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2022 |
| Grant date | Feb 25, 2025 |
| Priority date | — |
| Expiry date | Sep 2, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/687
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A temporary MEMS-based locking assembly is configured to temporarily compress electrically conductive flexures and includes: a first locking structure coupled to a first portion of a MEMS conductive assembly; a second locking structure coupled to a second portion of the MEMS conductive assembly, wherein: the electrically conductive flexures are positioned between the first portion of the MEMS conductive assembly and the second portion of the MEMS conductive assembly, and the first and second locking structures are configured to engage each other upon the compression of the electrically conductive flexures to effectuate the locking of the first portion of the MEMS conductive assembly with respect to the second portion of the MEMS conductive assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.