Vacuum valve for providing a symmetrical fluid flow
US12241556B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2021 |
| Grant date | Mar 4, 2025 |
| Priority date | — |
| Expiry date | May 28, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Disclosed is a regulating vacuum valve having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.