Femtosecond laser system for processing micro-hole array
US12246393B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Sep 29, 2021 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Jul 21, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/384
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Provided is a femtosecond laser system for processing a micro-hole array, comprising: a femtosecond laser, a half-wave plate, a polarizer, a concave lens, a convex lens, a diaphragm, a mechanical shutter, a phase-type spatial light modulator, a first plano-convex lens, a reflecting mirror, a second plano-convex lens, a dichroic mirror, a camera, a processing objective lens, a six-axis translation stage and a transmissive white light source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.