Evaporator boats for metallization installations
US12247282B2 · kind B2 · utility
0Cited by
9References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 24, 2017 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Sep 24, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In one aspect, evaporator boats are provided which, in some embodiments, exhibit resistance to corrosion and associated performance degradation imparted by exposure to molten metals, including aluminum. An evaporator boat described herein comprises a body and an evaporator surface, the body comprising a boron nitride (BN) component and a TiB2 component including a solid solution of TiB2 and one or more elements selected from the group consisting of silicon and metallic elements of Groups IVB-VIIIB of the Periodic Table.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.