Patent · US Active

Micro-displacement measurement system having picometer scale resolution and measurement method

US12247856B2 · kind B2 · utility

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0References

2Claims

0Family size

Assignee

Hefei University of Technology · CN

Inventors

Fangfang LIU · Daguantang, CN
Xinyang Liu · Daguantang, CN
Wei Zhou · Tianjin, CN
Xin RAN · Daguantang, CN
Hongli Li · Westborough, US
Haojie Xia · Chongqing, CN

Key dates

Filing date	Jul 5, 2022
Grant date	Mar 11, 2025
Priority date	—
Expiry date	Jul 5, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micro-displacement measurement system having a picometer scale resolution and a measurement method. The measurement system comprises a probe module, a demodulation optical path module, a static lock-in amplification module, an upper computer module, and a micro-displacement drive module. The probe module comprises a measurement FBG sensor, a matching FBG sensor, a precision stainless steel needle tube, and an external support; the demodulation optical path module comprises an ASE broadband light source, a first circulator, a second circulator, and an InGaAs photodetector; the upper computer module comprises a data acquisition card and a computer; and the micro-displacement drive module comprises a piezoelectric ceramic nano-positioner, a piezoelectric ceramic driver, a three-dimensional precision micro-motion platform.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.