Charged-particle measurement apparatus and control method of charged-particle measurement apparatus
US12248116B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 17, 2022 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Jul 7, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/2985
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
According to one embodiment, a charged-particle measurement apparatus comprising: a plurality of gas detectors in each of which gas for detecting passage of a charged particle is enclosed; a trajectory calculator configured to calculate a trajectory of the charged particle based on detection signals outputted from the gas detectors and each of the parameters associated with the gas detectors; a measurer configured to measure an object based on the trajectory of the charged particle, the object being a measurement target; a signal intensity acquirer configured to acquire signal intensity of the detection signals; an operating state monitor configured to evaluate the operating states of the gas detectors based on the signal intensity corresponding to the gas detectors; and a parameter updating processor configured to update at least one parameter when at least one of the operating states of the gas detectors associated with this parameter changes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.