Light deflector and manufacturing method
US12248138B2 · kind B2 · utility
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4Claims
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Key dates
| Filing date | May 20, 2020 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Jan 15, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/105
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A light deflector includes a mirror part, a pair of torsion bars, inside piezoelectric actuators, and a movable frame part. The crystal orientation in the axial direction of the torsion bars is set to <100>. In the joint edge portions of the torsion bars and the inside piezoelectric actuators, radius parts are oriented to <110> and each formed by a curved surface recessed inward. The amount of waviness about a roughness curve derived from the curved surface is set within 600 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.