Method for manufacturing variable radio frequency micro-electromechanical switch
US12249468B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 27, 2021 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Feb 25, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0072
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A radio frequency micro-electromechanical switch (RF MEMS switch) is described. Also described is a method of producing such an RF MEMS switch. The method can include depositing on a substrate a first sacrificial layer and producing a pattern. A first layer of metal is deposited on the first sacrificial layer and on the substrate. A pattern is produced to form a first RF line and a first MEMS membrane. A second sacrificial layer is deposited on the first RF line and a pattern is produced. A dielectric layer is deposited on the second sacrificial layer and then a pattern is produced to form a dome. The first and second sacrificial layers are removed through a dome opening. A second metal layer is deposited on the dome and on the substrate, and then a pattern is produced to plug the dome opening(s) and to form a second RF line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.