Patent · US Active

Method for manufacturing thin film transistor, and electronic device

US12249655B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 12, 2023
Grant dateMar 11, 2025
Priority date
Expiry dateSep 12, 2043

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG09G2310/08
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

Disclosed are a thin film transistor (TFT) including an oxide semiconductor layer capable of being applied to high-resolution flat panel display devices requiring high-speed driving, a gate driver including the TFT, and a display device including the gate driver. The TFT includes first oxide semiconductor layer consisting of indium-gallium-zinc-tin oxide (IGZTO) and a second oxide semiconductor layer including indium-gallium-zinc oxide (IGZO). A content ratio (Ga/In) of gallium (Ga) to indium (In) of the second oxide semiconductor layer is higher than a content (Ga/In) of Ga to In of the first oxide semiconductor layer, and a content ratio (Zn/In) of zinc (Zn) to In of the second oxide semiconductor layer is higher than a content (Zn/In) of Zn to In of the first oxide semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.