Patent · US Active

Light source apparatus

US12250762B2 · kind B2 · utility

0Cited by

2References

16Claims

0Family size

Assignee

Ushio Denki Kabushiki Kaisha · JP

Inventor

Yusuke Teramoto · Aachen, DE

Key dates

Filing date	Nov 15, 2022
Grant date	Mar 11, 2025
Priority date	—
Expiry date	Apr 4, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH05G2/0023
WIPO fieldMedical technology
WIPO sectorInstruments

Abstract

A light source apparatus, in which an energy beam transforms a liquid raw material into plasma to extract radiation, includes a rotation body, a raw material supply section, and a layer thickness adjustment section. The rotation body is disposed at a position onto which the energy beam is incident, and includes a groove overlapping with an incident area of the energy beam. The raw material supply section supplies the groove with the liquid raw material. The layer thickness adjustment section adjusts a layer thickness of the liquid raw material such that a front surface of the liquid raw material forms a concave surface in response to the groove in the incident area of the energy beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.