Plasma source chamber for a spectrometer

US12253470B2 · kind B2 · utility

Assignee

• THERMO FISHER SCIENTIFIC (BREMEN) GMBH · DE

Inventors

• Norbert Quaas · Bremen, DE
• Ayrat Murtazin · Bremen, DE
• Sebastian Geisler · Bremen, DE
• Tobias Wolf · Sandkrug, DE
• Jan Rathkamp · Bremen, DE
• Dirk Wohlers · Bremen, DE
• Mikhail G. Skoblin · Dolgoprudny, RU

Key dates

• Filing date: Apr 8, 2020
• Grant date: Mar 18, 2025
• Expiry date: Aug 23, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/022
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A plasma source chamber (10) for use in a spectrometer comprises an inner housing (11) for accommodating a plasma source (31) and an outer housing (12) accommodating the inner housing. The outer housing (12) comprises at least one outer air inlet opening (21) in a first wall and at least one outer air outlet opening (22) in a second wall. Walls of the inner housing and walls of the outer housing define a spacing (25) so as to allow a first air flow (1) from the at least one outer air inlet opening (21) to the at least one outer air outlet opening (22) through the spacing (25) between the inner housing and the outer housing. The inner housing (11) comprises at least one inner air inlet opening (23) in a first wall and at least one inner air outlet opening (24) in a second wall to allow a second air flow (2) from the at least one inner air inlet opening to the at least one inner air outlet opening through the inner housing. Thus, an improved cooling of the outer surfaces of the plasma source chamber is achieved.