Patent · US Active

High refractive index nano-imprint lithography resin

US12253799B2 · kind B2 · utility

0Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 24, 2023
Grant dateMar 18, 2025
Priority date
Expiry dateJul 17, 2043

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC08K2201/011
  • WIPO fieldMacromolecular chemistry, polymers
  • WIPO sectorChemistry

Abstract

A photo nanoimprint lithography (P-NIL) resin is disclosed. The P-NIL resin comprises: a cross-linkable organic binder; solvent based inorganic nanoparticles dispersed in the P-NIL resin; and a solvent configured to be evaporated; the P-NIL resin having a viscosity in the range of 4,000 to 6,000 centipoise at 25° C. after the solvent is evaporated prior to curing the P-NIL resin; and the P-NIL resin having a refractive index of greater than 1.6 at 589 nm and glass transition temperature of greater than 50° C. after curing by a photo initiator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.