Solidly-mounted transversely-excited film bulk acoustic resonators with low thermal impedance
US12255617B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Feb 2, 2022 |
| Grant date | Mar 18, 2025 |
| Priority date | — |
| Expiry date | Jul 1, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/605
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonators, filters and methods of making resonators are disclosed. An acoustic resonator includes a substrate, a piezoelectric plate, and an acoustic Bragg reflector between a surface of the substrate and a back surface of the piezoelectric plate. An interdigital transducer (IDT) on a front surface of the piezoelectric plate includes first and second busbars and a plurality of interleaved fingers extending alternately from the first and second busbars. At least a portion of the first busbar contacts the substrate through an opening in the piezoelectric plate and acoustic Bragg reflector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.