Leak-free, diffusion-blocking check valve, pump and method
US12258952B2 · kind B2 · utility
0Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2023 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | May 10, 2043 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K99/0015
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A closed leak-free, diffusion-blocking one-way check valve is composed of a substrate having a flow passage through the substrate, the flow passage has a sealing surface between the substrate and a membrane preventing flow through the flow passage. A thin film having internal stress is disposed on the membrane which induces deformation of the membrane biasing the membrane resulting in the sealing surface in a closed orientation. A method for fabrication and pump utilizing the check valve are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.