Light-source apparatus, inspection apparatus, and adjustment method
US12259339B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2023 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | Nov 9, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0071
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A light-source apparatus, an inspection apparatus, and an adjustment method capable of facilitating the adjustment of the temperature of a BBO crystal are provided. A light-source apparatus according to the present disclosure includes a first light source configured to generate visible light, a first external resonator including a plurality of optical mirrors, a BBO crystal disposed in the first external resonator, capable of generating UV light in a wavelength range of 233 nm to 236 nm, the UV light being a second harmonic of the visible light, a one- or two-dimensional semiconductor sensor disposed near a far-field image plane formed through an optical element provided on an optical path of the UV light, and a calculation unit configured to calculate a representative position of a light intensity distribution detected by the semiconductor sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.