Electron detection device and scanning electron microscope
US12261016B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 3, 2025 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | Jan 3, 2045 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2448
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided are an electron detection device and a scanning electron microscope. The electron detection device includes: a reflective energy analyzer including first and second control electrodes that are sequentially arranged in an incidence direction of an electron beam; a first detector disposed at a side of the second control electrode away from the first control electrode; a second detector disposed at a side of the first control electrode away from the second control electrode; and a conductive shielding tube penetrating the first and second control electrodes in the incidence direction and configured to shield an electric field generated by the reflective energy analyzer, allowing the electron beam to pass through and be incident on the target sample. First control electrode is configured to generate a first electric field between the first and second control electrodes. The first electric field is configured to guide the secondary electron to the first detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.