Patent · US Active

Device and method for measuring microwave surface resistance of dielectric conductor deposition interface

US12265109B2 · kind B2 · utility

0Cited by
0References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 19, 2023
Grant dateApr 1, 2025
Priority date
Expiry dateAug 17, 2043

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R27/04
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device for measuring a microwave surface resistance of a dielectric conductor deposition interface includes: a test platform, a calibration component, a sealing cavity and a support plate; wherein the test platform comprises: a shielding cavity having an open bottom, a dielectric rod, an input coupling structure, an output coupling structure, and a dielectric supporter; the dielectric conductor test sample and the test platform form a TE0m(n+δ) mode dielectric resonator; the calibration component and the dielectric conductor test sample are mounted on the test platform to measure corresponding quality factors, thereby calculating the microwave surface resistance of the deposition interface of the dielectric conductor test sample. The present invention requires no pre-measurement of relative permittivity and loss tangent of the dielectric conductor test sample. After calibration, the microwave surface resistance of the dielectric conductor deposition interface can be obtained by only one non-destructive measurement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.