Vertical-cavity surface-emitting laser array with integrated capacitor
US12266902B2 · kind B2 · utility
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4References
20Claims
0Family size
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Key dates
| Filing date | Jun 30, 2021 |
| Grant date | Apr 1, 2025 |
| Priority date | — |
| Expiry date | Oct 15, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical chip may include a vertical-cavity surface-emitting laser (VCSEL) structure. The optical chip may include a capacitor over at least a portion of an active layer of the VCSEL structure that is outside of an active region of the VCSEL structure. The capacitor may include a first metal layer over the portion of the active layer, a dielectric layer on the first metal layer, and a second metal layer on the dielectric layer. The optical chip may include an isolation region between a substrate of the VCSEL and a portion of the capacitor outside of the VCSEL.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.