MEMS microphone
US12269732B2 · kind B2 · utility
0Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2021 |
| Grant date | Apr 8, 2025 |
| Priority date | — |
| Expiry date | Feb 19, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R7/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate, an insulating layer, and a diaphragm. The substrate has an opening portion. The backplate is disposed on a side of the substrate, with protrusions protruding toward the substrate. The diaphragm is movably disposed between the substrate and the backplate and spaced apart from the backplate by a spacing distance. The protrusions are configured to limit the deformation of the diaphragm when air flows through the opening portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.