Infrared imaging microbolometer and associated production methods
US12270710B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2021 |
| Grant date | Apr 8, 2025 |
| Priority date | — |
| Expiry date | Jul 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.