Ionization detector and detection method

US12272512B2 · kind B2 · utility

Assignee

• KETEK GmbH Halbleiter—und Reinraumtechnik · DE

Inventors

• Michael Bachmann · Rutesheim, DE
• Andreas Schels · Munich, DE
• Florian Herdl · Kiefersfelden, DE
• Stefan Zimmermann · Laufenbürg, DE
• Simon Edler · Munich, DE
• Erik Bunert · Langenhagen, DE

Key dates

• Filing date: May 11, 2023
• Grant date: Apr 8, 2025
• Expiry date: May 11, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02527
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.