Coupling probe for micro device inspection
US12276679B2 · kind B2 · utility
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1References
34Claims
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Key dates
| Filing date | Mar 10, 2021 |
| Grant date | Apr 15, 2025 |
| Priority date | — |
| Expiry date | Dec 26, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/265
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure describes a probe design to measure cycles of microdevices. In particular, the probe comprises, electrodes, dielectric, stimulating capacitor, voltage stimulating source for time varying stimulating voltage signal and a series switch to control biasing condition. The probe structure further has a probe tip and resting pads (ring shape or otherwise) along with a leveling mechanism and apparatus. The disclosure also describes a method to measure cycles of microdevices using the probe structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.