Tungsten hexafluoride preparation method and apparatus based on photoelectric synergy

US12281025B2 · kind B2 · utility

Assignees

• Hubei University of Technology · CN
• ELECTRIC POWER RESEARCH INSTITUTE, CHINA SOUTHERN POWER GRID · CN
• Handan Puxin Electric Power Technology Co., Ltd. · CN

Inventors

• Yalong Li · Suzhou, CN
• Xiaoxing Zhang · Tangxia, CN
• Mingli FU · Longbeilingcun, CN
• Zhaodi Yang · 红钢城街道, CN
• Lei Jia · Beijing, CN
• Kun Wan · 红钢城街道, CN
• Dibo Wang · 流花街道, CN
• Guozhi Zhang · 红钢城街道, CN
• Shuangshuang Tian · 红钢城街道, CN
• Guoguang Zhang · Westfield, US
• Guangke Li · Hanshan District, CN

Key dates

• Filing date: Oct 30, 2024
• Grant date: Apr 22, 2025
• Expiry date: Oct 30, 2044

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B01J19/0053
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SF6 undergoes decomposition under the synergistic effect of photocatalysis and plasma, SF6 is decomposed to generate fluorine atoms and low-fluorine sulfides such as SF5 and SF4. The generated fluorine ions, SF5, SF4 and low-fluorine sulfides further react with metal tungsten to generate WF6 specialty gas, which not only realizes the utilization of fluorine resources of SF6, but also replaces highly toxic fluorine gas with non-toxic SF6 exhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.