Method of removing an adhesive for an EUV mask and method of reusing an EUV mask
US12281243B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Aug 9, 2022 |
| Grant date | Apr 22, 2025 |
| Priority date | — |
| Expiry date | Jan 12, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/82
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An adhesive for an EUV mask includes an epoxy resin composition in an amount of 50 wt % to 80 wt % based on a total weight of the adhesive, the epoxy resin composition including an epoxy resin, a hardener, a toughening agent, a filler, and a curing accelerator, and an inorganic filler in an amount of 20 wt % to 50 wt % based on the total weight of the adhesive, the inorganic filler including one or more of aluminum hydroxide or calcium carbonate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.