Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tilt

US12283457B2 · kind B2 · utility

Assignee

• Carl Zeiss MultiSEM GmbH · DE

Inventors

• Nicole Rauwolf · Birkhausen, DE
• Nico Kaemmer · Königsbronn, DE
• Michael Behnke · Mendota, US
• Ingo Mueller · Heidelberg, DE
• Dirk Zeidler · Oberkochen, DE
• Arne Thoma · Heidenheim, DE
• Christof Riedesel · Oberkochen, DE
• Gunther Scheunert · Heidenheim, DE

Key dates

• Filing date: Jan 24, 2022
• Grant date: Apr 22, 2025
• Expiry date: Feb 17, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2817
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.