High-frequency grounding device and vacuum valve having high-frequency grounding device
US12283469B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2022 |
| Grant date | Apr 22, 2025 |
| Priority date | — |
| Expiry date | Sep 22, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/186
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a high-frequency grounding device (40) for use with a vacuum valve for closing and opening a valve opening of a vacuum chamber system, having a grounding band (42) made of a conductive material for discharging electrical charges occurring on the vacuum valve, wherein the grounding band has a first end (41) and a second end (43) and, for grounding the vacuum valve, is designed to be connected at the first end to a valve closure of the vacuum valve, and to be connected at the second end to a component of the vacuum chamber system, wherein the high-frequency grounding device has a correction impedance, wherein the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and the correction impedance has a first element for shifting a resonant frequency of the resonant circuit and/or a second element for reducing a quality of the resonant circuit. The invention additionally relates to a vacuum valve and a vacuum chamber system having such a high-frequency grounding device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.