Hollow cathode discharge assistant transformer coupled plasma source and operation method of the same
US12284747B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 12, 2023 |
| Grant date | Apr 22, 2025 |
| Priority date | — |
| Expiry date | Oct 3, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed are a hollow cathode discharge assistant transformer coupled plasma source and an operation method of the same. A reaction chamber with an annular channel is provided, and a ferrite transformer with a first ferrite magnetic core wound with a first coil and a second ferrite magnetic core wound with a second coil and a drive power source is provided. The drive power source applies an AC power supply with a first voltage to the first coil to generate an alternating magnetic field. The second coil generates a second voltage by inducing the alternating magnetic field to excite a working gas in the annular channel into a plasma through a hollow cathode discharge mechanism. The annular channel induces the alternating magnetic field through a transformer coupled plasma mechanism to generate an induced electric field to excite the plasma to form an electric current in the annular channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.