Piezoelectric micromachined ultrasonic transducer with a patterned membrane structure
US12284920B2 · kind B2 · utility
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3References
18Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 17, 2023 |
| Grant date | Apr 22, 2025 |
| Priority date | — |
| Expiry date | Oct 17, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/883
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.