Aluminum-scandium alloy target with high scandium content, and preparation method thereof

US12286692B2 · kind B2 · utility

Assignee

• HUNAN RARE EARTH METAL MATERIAL RESEARCH INSTITUTE CO., LTD. · CN

Inventors

• Hua Liu · Shanghai, CN
• Meisong Huang · Hunan, CN
• Yuchuan Fan · Shanghai, CN
• Zhijian Wang · Beijing, CN
• Shuaiguang Jia · Hunan, CN
• Zhen Fu · Hunan, CN
• Maohai Yao · Hunan, CN
• Luhui Yang · Hunan, CN

Key dates

• Filing date: Aug 7, 2020
• Grant date: Apr 29, 2025
• Expiry date: Apr 17, 2042

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B22F2998/10
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Disclosed are an aluminum-scandium alloy target with high scandium content and a preparation method thereof. The method comprises: preparing aluminum and scandium; melting the scandium; mixing the aluminum into the scandium, smelting and cooling to obtain an aluminum-scandium alloy through a plurality of cycles; ball-milling the alloy to obtain alloy powder and drying in vacuum, then pre-pressing and sintering in vacuum to obtain an aluminum-scandium alloy target billet; performing a thermal deformation process on the target billet to obtain the target, comprising hot forging, hot rolling and finish machining. In the present disclosure, the target has more uniform structure and chemical composition, higher relative density (up to 99.0% or more), finer grain size and higher ductility; reduce defects of shrinkage cavity and porosity, save material cost, solve problem of alloys with high brittleness, unable to process targets, meeting the requirements on wiring materials for large-scale integrated circuits.