Mask assembly, deposition apparatus including the same, and fabricating method of the mask assembly
US12286700B2 · kind B2 · utility
0Cited by
3References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 16, 2023 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | May 1, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.