Heterodyne laser interferometer based on integrated dual polarization beam-splitting assembly and measurement method thereof
US12287198B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2024 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Mar 4, 2044 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02A90/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A heterodyne laser interferometer and a measurement method based on an integrated dual polarization beam-splitting assembly is provided. Technical points: The first polarization beam splitter and the second polarization beam splitter of the integrated dual polarization beam-splitting assembly are arranged in parallel. The first polarization beam splitter is attached with a first polarizer, a third polarizer, and a first quarter-wave plate; The second polarization beam splitter is attached with a second polarizer, a fourth polarizer, and a second quarter-wave plate; The output optical path of the first quarter-wave plate and the second quarter-wave plate is equipped with target mirrors, while the output optical path of the third quarter-wave plate and the fourth quarter-wave plate is equipped with photodetectors. The assembly and adjustment of the present invention is more flexible and reduce the processing difficulty and processing error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.