Three-axis MEMS gyroscope
US12287205B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2022 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Jul 6, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A three-axis MEMS gyroscope includes a substrate, a sensing unit connected with the substrate, and a driving unit driving the sensing unit to move. The substrate includes anchor point structures and coupling structures connected with the anchor point structures. The driving unit includes driving pieces. One ends of each of the driving pieces are elastically connected with an adjacent coupling structure. The sensing unit includes X and Y mass blocks and Z mass blocks. Each of the X and Y mass blocks is arranged in a corresponding avoiding space. The X and Y mass blocks are respectively connected with adjacent coupling structures to form a rectangular frame. The Z mass blocks are connected with the driving pieces and separately arranged on one side of each driving piece away from each anchor point structure. The three-axis MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.