Phased array LiDAR transmitting chip of mixed materials, manufacturing method thereof, and lidar device

US12287432B2 · kind B2 · utility

Assignee

• VANJEE TECHNOLOGY CO., LTD. · CN

Inventors

• Pengfei Wang · Shanghai, CN
• Yang Xu · Wenhe, CN
• Yejin Zhang · Beijing, CN
• Hongyan Yu · Beijing, CN
• Jiaoqing Pan · Beijing, CN
• Qingfei Wang · Beijing, CN
• Linyan Tian · Beijing, CN

Key dates

• Filing date: Sep 30, 2020
• Grant date: Apr 29, 2025
• Expiry date: Feb 29, 2044

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12164
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present disclosure provides a phased array LiDAR transmitting chip of mixed materials, a manufacturing method thereof, and a LiDAR device. The phased array LiDAR transmitting chip of mixed materials includes: a first material structure layer and an SOI silicon waveguide structure layer, the first material structure layer is optically connected to the SOI silicon waveguide structure layer through a coupling connection structure; the first material structure layer is configured to couple input light into the chip; the coupling connection structure is configured to split a light wave coupled to the chip, and couple each of split light waves into a corresponding silicon waveguide in the SOI silicon waveguide structure layer; where a non-linear refractive index of the first material in the first material structure layer is lower than a non-linear refractive index of silicon material.