Depositing coatings on and within housings, apparatus, or tools
US12291775B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 2022 |
| Grant date | May 6, 2025 |
| Priority date | — |
| Expiry date | Jan 19, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32394
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A device for coating an interior surface of a housing defining a volume comprising a plurality of reactant gas sources including reactant gases for one or more surface coating processes; first and second closures to sealingly engage with an inlet and outlet of the volume of the housing to provide an enclosed volume; a delivery line fluidically coupled to the first closure and the plurality of reactant gas sources to deliver the reactant gases to the enclosed volume; and an output line fluidically coupled to the second closure to remove one or more reactant gases, byproduct gases, or both from the enclosed volume. A method for coating an interior surface of a housing is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.