Multi-waveband-tunable multi-scale meta-material and preparation method and spectral detection method thereof
US12292377B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2021 |
| Grant date | May 6, 2025 |
| Priority date | — |
| Expiry date | Sep 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/65
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multi-waveband-tunable multi-scale meta-material and a preparation method and a spectral detection method thereof are provided. The meta-material includes a stretchable layer, a non-stretchable support layer, a metal layer, and a nanoparticle layer sequentially stacked from bottom to top. The stretchable layer is a polydimethylsiloxane (PDMS) layer. The non-stretchable support layer is a polyimide (PI) layer. The metal layer is a gold layer. The nanoparticle layer is modified with a hydrophobic group. The preparation method includes vacuum-evaporating fluorosilane on a silicon wafer, spin-coating PDMS, heat-curing PDMS, conducting plasma cleaning, spin-coating and curing PI, sputtering gold, self-assembling the nanoparticles on a water surface to form the nanoparticle layer, transferring the nanoparticle layer to the metal layer, and etching according to a pattern. The multi-waveband-tunable multi-scale meta-material can sense biochemical molecules by utilizing the advantages of multiple wavebands, is simple and fast to operate, and is suitable for various detection needs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.