System of automatic adjustment of laser reflection path

US12292559B2 · kind B2 · utility

Assignee

• NORTH UNIVERSITY OF CHINA · CN

Inventors

• Jun Liu · Shanghai, CN
• Zongmin Ma · Taiyuan, CN
• Jun Xu · Nanjing, CN
• Jun Tang · Beijing, CN
• Yunbo Shi · Taiyuan, CN
• Huanfei Wen · Taiyuan, CN
• Cheng Jie Dong · Sunnyvale, US
• Huiyun Wang · Taiyuan, CN

Key dates

• Filing date: Apr 21, 2021
• Grant date: May 6, 2025
• Expiry date: Nov 26, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/365
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A system of automatic adjustment of a laser reflection path, comprising a central processing device, a driving device, a four-quadrant photodetector, a driving arm, a micro cantilever, a sample, a sample placing table, a light reflector, a laser, a CCD equipped with an optical microscope, a vibration sensor, a signal processing circuit, a display device, a storage device, and a control device; a system of automatic adjustment of the laser reflection path is controlled by the control device, wherein a laser beam is emitted by the laser, an image collected by the CCD equipped with the optical microscope is processed by the central processing device to identify the micro cantilever, and then a driving arm is driven by a driving device to drive the micro cantilever to move to the center of a laser spot, during which vibration signals of the driving arm are also under monitoring.