Diode-pumped solid-state laser apparatus for laser annealing
US12294194B2 · kind B2 · utility
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9References
14Claims
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Key dates
| Filing date | Jan 13, 2020 |
| Grant date | May 6, 2025 |
| Priority date | — |
| Expiry date | May 25, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2383
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Laser annealing apparatus includes a plurality of frequency-tripled solid-state lasers, each delivering an output beam of radiation at a wavelength between 340 nm and 360 nm. Each output beam has a beam-quality factor (M2) greater of than 50 in one transverse axis and greater than 20 in another transverse axis. The output beams are combined and formed into a line-beam that is projected on a substrate being annealed. Each output beam contributes to the length of the line-beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.