Optical device
US12298132B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2023 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Apr 7, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/104
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.