Observation device
US12298221B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 27, 2022 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Feb 11, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1497
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An observation device includes an illumination optical system and an observation optical system. The illumination optical system includes a light source and an aperture member. The observation optical system includes an objective lens, an optical structure, and a detector. The optical structure is disposed at a first position which is the position conjugate with the aperture member. The optical structure includes a blocking portion that blocks light and a transmitting portion that transmits light, the blocking portion having a shape including the shape of an image of an aperture of the aperture member which is formed on the optical structure. The detector detects dark-field light passing through the optical structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.