Video rate mid-infrared photothermal microscopy system using synchronized laser scanning
US12298238B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2023 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Aug 15, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mid-infrared photothermal microscopy system images a sample. A mid-infrared optical source generates a mid-infrared beam which is directed along a first optical path to reach the substrate on a first side and heat the sample. A probe light source generates a probe light which is directed along a second optical path to reach the substrate on a second side and illuminate the sample. A first laser scanner is positioned along the first optical path and configured to rotate to redirect light and scan the sample with the mid-infrared beam. A second laser scanner is positioned along the second optical path and configured to rotate to redirect light and scan the sample with the probe light. The laser scanners each include at least one mirror driven to rotate such that the mid-infrared beam and the probe light scan the sample synchronously.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.