Inspection method and inspection apparatus for performing the same
US12298256B2 · kind B2 · utility
0Cited by
2References
19Claims
0Family size
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Key dates
| Filing date | Nov 30, 2022 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Nov 18, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/20221
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection method includes irradiating a laser to an inspection target, reflecting a first emitted laser from a transmission layer included in the inspection target, reflecting a second emitted laser from a scattering layer included in the inspection target, detecting a reference image from the second emitted laser; and measuring a separation distance obtained from the first emitted laser, based on the reference image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.