Germanium waveguide photodetector with integrated heater
US12298560B2 · kind B2 · utility
0Cited by
6References
20Claims
0Family size
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Key dates
| Filing date | Nov 10, 2021 |
| Grant date | May 13, 2025 |
| Priority date | — |
| Expiry date | Aug 26, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12138
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In one embodiment, an apparatus includes a substrate, an oxide layer on the substrate, a silicon layer on the oxide layer, which includes a waveguide region and etched regions adjacent to the waveguide region, a germanium layer on the silicon layer and adjacent the waveguide region of the silicon layer, and a resistive element adjacent to the germanium layer to provide heat to the germanium layer in response to a current applied to the resistive element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.