Patent · US Active

Connecting components of an optical imaging device

US12298674B2 · kind B2 · utility

0Cited by

3References

22Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Viktor Schulga · Lauchheim, DE
Maximilian Schwenk · Zöschingen, DE
Henner Baitinger · Aalen, DE

Key dates

Filing date	Dec 15, 2022
Grant date	May 13, 2025
Priority date	—
Expiry date	Jun 9, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An arrangement of a microlithographic imaging device includes a first component, a second component and a connection unit of a connection device. The connection unit is configured to cooperate with the first component in a connection region between the first and second components. The connection unit is configured to cooperate, in a mounted state, with a tensioning unit of the connection device in a tensioning direction. The tensioning unit cooperates with the second component to connect the first and second component to one another in the connection region. The connection unit includes a main body. The insert is inserted in a receiving cutout in the main body and connected to the main body to transfer forces in the tensioning direction. The insert is configured to cooperate with the tensioning unit to connect the first and second components to one another in the connection region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.