Patent · US Active

Microacoustic filter with a cavity stack

US12301211B2 · kind B2 · utility

0Cited by

1References

25Claims

0Family size

Assignee

RF360 Singapore Pte. Ltd. · SG

Inventors

Willi AIGNER · Moosinning, DE
Benno Blaschke · Munich, DE
Christian Ceranski · Munich, DE

Key dates

Filing date	Sep 9, 2022
Grant date	May 13, 2025
Priority date	—
Expiry date	Apr 20, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/708
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

An apparatus is disclosed for implementing a microacoustic filter with a cavity stack. In an example aspect, the apparatus includes a microacoustic filter with an electrode structure, a cavity stack, a buffer layer, and a piezoelectric layer. The cavity stack comprises a conductive layer, a substrate layer, and at least two pillars extending past a plane defined by a surface of the substrate layer and towards the conductive layer to form a cavity between the substrate layer and the conductive layer. The buffer layer is disposed between the conductive layer of the cavity stack and the electrode structure. The piezoelectric layer is disposed between the buffer layer and the electrode structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.